TEM investigation of ion beam mixed Au/Si bilayer

Peixuan Wang; Yupu Li; Xiaodong Sun

您当前的位置：

首页 >

文章列表页 >

TEM investigation of ion beam mixed Au/Si bilayer

更新时间：2022-08-16

- TEM investigation of ion beam mixed Au/Si bilayer
- Nuclear Techniques Vol. 11, Issue 3, (1988)
- 作者机构：
  
  北京钢铁学院
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Published：1988-03
- 稿件说明：
移动端阅览
Peixuan Wang, Yupu Li, Xiaodong Sun. TEM investigation of ion beam mixed Au/Si bilayer[J]. Nuclear techniques, 1988, 11(3): 50-52,63,64.
DOI：

Peixuan Wang, Yupu Li, Xiaodong Sun. TEM investigation of ion beam mixed Au/Si bilayer[J]. Nuclear techniques, 1988, 11(3): 50-52,63,64. DOI：

摘要

用剖面制样技术对在150K、293K、373K温度下Ar离子束混合的Au/Si界面层进行了透射电镜研究，获得不同深度的一些结构细节。

Abstract

A cross section electron microscopy was used to reexamine the structure of ion beam mixed Au/Si bilayers. The mixing was carried out with 150—300 keV Ar ion beams for dose (2—5.6) ×10

/cm

. Target temperature ranged from 150 to 373K. Some information on the fine structure at interfacial layers were obtained.

关键词

Keywords

references

B. Y. Tsaur and J. W. Mayer , Phil. Mag. , A43 ( 1981 ), 345 .

Von Allmen et al . , Appl. Phys. Lett. , 36 ( 1980 ), 207 .

Views

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Experiments and applications of IS-A type duopigatron ion source

Analysis of offspring of wheat transferred with exogenous DNA by ion beam

Anisotropic deformation of polystyrene particles under MeV Au ion bombardment

Fabrication of large area nanodot arrays by assistance of low energy ion bombardment

The accelerator-electron microscope interface facility at Wuhan University

Related Author

Zengliang Yu

Ping Xu

Jianjun He

Jun Zhou

SU Zhanglei QI Yanlei GU Yunhong SHEN Jinhu QIN Guangyong

戚艳磊

谷运红

沈金虎

Related Institution

Institute of plasma physics, Academia Sinica

Henan Provincial Key Laboratory of Ion Beam Bioengineering,Zhengzhou University

中国科学院力学研究所国家微重力实验室

Institute of Heavy Ion Physics,State Key Laboratory of Nuclear Physics and Technology,Peking University,Beijing 100871,China) 2

Shanghai Institute of Applied Physics. Chinese Academy of Sciences

AI问答

Address：2019 Jialuo Road, Jiading, Shanghai, China Postal code：201800
Tel：021-39194977 Email：LHB@sinap.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 沪ICP备05005479号-1 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.
Total Visits：880647 Visits Today：174

⁰