A short gap deceleration system for ion beams with very low energy

Miao Chen; Zhiyi Zou; Shouxin Chen; Chunchang Sun

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A short gap deceleration system for ion beams with very low energy

更新时间：2022-08-16

- A short gap deceleration system for ion beams with very low energy
- Nuclear Techniques Vol. 10, Issue 5, (1987)
- 作者机构：
  
  中国科学院上海原子核研究所
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：23 April 1986，
  
  Published：1987-05
- 稿件说明：
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Miao Chen, Zhiyi Zou, Shouxin Chen, et al. A short gap deceleration system for ion beams with very low energy[J]. Nuclear techniques, 1987, 10(5): 37-38,36,62.
DOI：

Miao Chen, Zhiyi Zou, Shouxin Chen, et al. A short gap deceleration system for ion beams with very low energy[J]. Nuclear techniques, 1987, 10(5): 37-38,36,62. DOI：

摘要

当今，甚低能离子束（几十eV—几个keV）在材料科学中发挥着越来越大的作用。低能离子注入和低能离子束沉积（尤其是经过质量分析的

[1]

）在离子溅射等应用基础研究和各种功能膜的制备等方面有着宽广的应用前景。应用实验室电磁同位素分离器制备核物理实验用各种稳定同位素靶（几十一几百μg/cm

的薄靶）时为了提高收集效率（要使自溅射系数小于1），也需要具有一定束流强度的甚低能离子束。为此，设计并试验了一个短间隙后减速系统，以获得~500eV的低能离子束。

Abstract

A short-gap

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ratarding system for getting~500 eV very low energy ion beams is described. Some design rules are discussed. Some experimental results are given also.

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references

K. Miyake and Т. Tokuydma , Thin Solid films. 92 , 123 ( 1982 ).

R. P Borghri and D. A. Dunn , J. Appl. Phvs. , 34 , 692 ( 1963 ).

J. H. Freemnn et al. , Nucl. Instr. Meth. , 135 , 1 . ( 1976 ).

G. D. Alton et al. , Nucl. Instr. Meth. , 177 , 273 ( 1980 ).

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