The measurements and computer simulation of ion-implantation distribution in p<sup>-</sup> well and channel region

Tingqing Zhang; Jianmin Ren; Jialu Liu; Jinwei Chui; Yan Wang

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The measurements and computer simulation of ion-implantation distribution in p^- well and channel region

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- The measurements and computer simulation of ion-implantation distribution in p^- well and channel region
- Nuclear Techniques Vol. 10, Issue 1, (1987)
- 作者机构：
  
  西北电讯工程学院
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Published：1987-01
- 稿件说明：
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Tingqing Zhang, Jianmin Ren, Jialu Liu, et al. The measurements and computer simulation of ion-implantation distribution in p^- well and channel region[J]. Nuclear techniques, 1987, 10(1): 21-25,61.
DOI：

Tingqing Zhang, Jianmin Ren, Jialu Liu, et al. The measurements and computer simulation of ion-implantation distribution in p^- well and channel region[J]. Nuclear techniques, 1987, 10(1): 21-25,61. DOI：

摘要

CMOS集成电路在LSI、VLSI中占有显著地位，它是当今乃至今后一段时期集成电路发展的主流。研究CMOSIC沟道、

－阱注入杂质的分布和再分布规律，对于指导工艺实践和提高电路性能具有现实意义。

Abstract

CMOS IC plays a very important role in LSI and VLSI. The understanding of ion-implantation impurity distribution and redistribution in channel and p

well will be meaningful for guiding IC technology and improving circuit functions.

This paper discusses models of ion-implantation

diffusion

oxidation and segregation which are used in computer simulation for low-dose implantation process

and gives some simulation results and measurements for comparison as well.

关键词

Keywords

references

J. F. Gibbons and S. MyLroie , Appl. Phys. Lett. , 22 , 568 ( 1973 ).

D. A. Antoniadis et al. , Tech. Rep., No.5019-2 , IС Labaratory, Stanford Univ. , June 1978 .

阮刚和周正利，上海半导体， 2 ，( 1982 )。

北京市半导体器件六厂，硼再分布过程的工艺摸拟程序， 1983 年。

华中工学院和西北电讯工程学院，半导体器件工艺原理，国防工业出版社， 1980 年。

冯康等编，数值计算方法，国防工业出版社， 1978 年。

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The measurements and computer simulation of ion-implantation distribution in p- well and channel region

DOI：

摘要

Abstract

关键词

Keywords

references

The measurements and computer simulation of ion-implantation distribution in p^- well and channel region