Study on angular distribution of atoms sputtered from Cu, Au and CuAu alloy

Zhenxia Wang; Zhenlan Tao; Liping Zheng; Dexin Cao; Miao Chen; Zuyao Zhou

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Study on angular distribution of atoms sputtered from Cu, Au and CuAu alloy

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- Study on angular distribution of atoms sputtered from Cu, Au and CuAu alloy
- Nuclear Techniques Vol. 10, Issue 1, (1987)
- 作者机构：
  
  1.中国科学院上海原子核研究所
  2.中国科学院上海冶金研究所
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Published：1987-01
- 稿件说明：
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Zhenxia Wang, Zhenlan Tao, Liping Zheng, et al. Study on angular distribution of atoms sputtered from Cu, Au and CuAu alloy[J]. Nuclear techniques, 1987, 10(1): 4-8,59.
DOI：

Zhenxia Wang, Zhenlan Tao, Liping Zheng, et al. Study on angular distribution of atoms sputtered from Cu, Au and CuAu alloy[J]. Nuclear techniques, 1987, 10(1): 4-8,59. DOI：

摘要

荷能离子轰击固体复合材料表面时某种成分的择优发射现象，是人们很感兴趣的研究课题。这是因为，择优发射机制至今尚不清楚。同时，很多现代表面分析设备，诸如俄歇电子能谱仪（AES）和二次离子质谱仪（SIMS）等等，都是利用离子剥层技术来进行深度剖面分析的。因此，在对复合材料样品进行上述分析时，也极需了解各元素在溅射过程中的部分产额以及角分布知识。

Abstract

Measurements of angular distribution of atoms sputtered from copper

gold element samples and Cu

0.7

0.3

alloy samples by 27 keV argon ions irradiation are reported. The following results are noteworthy: (1) All angular distributions were over cosine. The exponent

in fitting functions of the from con

was obtained

n=1.56 and 1.61 for copper and gold samples

and n=1.78 for Cu

0.7

0.3

alloy samples respectively; (2) The angular distributions of the component atoms sputtered from Cu

0.7

0.3

alloy showed that the copper ejected was preferential.

关键词

Keywords

references

M. R. Weller , Nucl. Instr. Meth. , 212 , 419 ( 1983 ).

H. H. Andersen et al. , Nucl. Instr. Meth. , 209/210 , 487 ( 1983 ).

H. H. Andersen et al. , Surf. Sci. , 123 , 39 ( 1983 ).

H. H. Andersen et al. , Nucl. Instr. Meth. , 191 , 241 ( 1981 ).

H. H. Andersen et al. , Mat. Fys. , 39 , 3 , ( 1974 ).

B. J. Garrison , Surf. Sci. , 114 , 23 ( 1982 ).

H. H. Andersen et al. , Nucl. Instr. Meth. , B6 , 459 ( 1985 ).

N. Matsunami et al. , Energy dependence of the yields of ion-induced sputtering of monatomic solids, IPPJ-AM-32 , 1983 , p. 25T .

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