The specimens of Fe deposited with Cr-C or Cr-Mo double layer films were bombarded by Ar
+
or Xe
+
ion beam at a dose of 2×10
17
cm
-2
.
Electro-diffraction analysis demonstrated that amorphous structure was formed after IBM. In the deeper layer a metastable phase was formed. Electro-diffraction and TEM exam have been used to investigate the transformation from amorphism to crystal when heating-up. The electrochemical results have shown that the anodic current
I
c
and
I
m
were reduced remarkably for passivation after IBM.
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references
H. Jones , Rep. Prog. Phys. , 36 , 1425 ( 1973 ).
G. Dearnaley , Thin Solid Films , 107 , 3 , 315 ( 1983 ).
J. Nan. Cryst. Solid , 56 , No 1-3 ( 1983 ).
C. A. Santos et al . , J. Phys. D: Appl. Phys. , 17 , 3 , 551 ( 1984 ).
B. Y. Tsaur et al . , Appl. Phys. Lett. , 36 , 823 ( 1980 ).
J. W. Mayer et al . , Nucl. Instr. Meth. , 1 ( 1981 ).