Ion implantation glass

Renyuan Hu

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Ion implantation glass

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- Ion implantation glass
- Nuclear Techniques Vol. 09, Issue 8, (1986)
- 作者机构：
  
  北京师范大学低能核物理研究所
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Published：1986-08
- 稿件说明：
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Renyuan Hu. Ion implantation glass[J]. Nuclear techniques, 1986, 09(8): 1-3,60.
DOI：

Renyuan Hu. Ion implantation glass[J]. Nuclear techniques, 1986, 09(8): 1-3,60. DOI：

摘要

离子注入和离子束分析技术在半导体和金属改性中已获得广泛应用，近年来又开始应用于绝缘体。在1981年第一届绝缘体辐照效应国际会议（REI-81）上，美国Sandia实验室Arnold

[1]

和意大利Chinellato

[2]

等发表离子注入玻璃效应的初步研究。Mazzoldi曾应用核反应分析对玻璃辐照效应进行了详细研究

[3，4]

。

Abstract

Ion implantation changes mechanical and optical properities of the glass surface. After ion bombardment the change of refractivity of glass surface has been measured. It has been found that the change of refractivity is concerned with Na ion migrations of glass surface during Ar ion bombardment and consists with Na composition contribution measured by NRA in related references. Network damage and volume contraction during Ar ion bombardment was observed.

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references

G. W. Arnold , International conference on radiation effect in insulators, REI-81 ARco , Italy , 1981 ,p. 41 .

V. Chinellato et al . , ibid , p. 42 .

P. Mazzoldi et al . , Veree Refract , 35 , 1 （ 1981 ）.

D. Mazzoldi , Nucl. Instr. Meth. , 209/210 , 1089 （ 1983 ）.

A. Miotello et al . , J. Phys. , C15 , 5615 （ 1981 ）.

G. Battaglin et al . , ibid , C15 , 31 （ 1981 ）.

G. W. Arnold et al . , J. Non-Crystalline Solids , 41 , 359 （ 1980 ）.

G. W. Aruold et al . , Nucl. Instr. Meth. , 182/183 , 733 （ 1981 ）.

A. Miotello and P. Mazzold , J. Phys. , C16 , 225 （ 1983 ）.

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