Some physic-metallurgical problems in interactions of ion beam with solid

Renyuan Hu

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Some physic-metallurgical problems in interactions of ion beam with solid

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- Some physic-metallurgical problems in interactions of ion beam with solid
- Nuclear Techniques Vol. 09, Issue 3, (1986)
- 作者机构：
  
  北京师范大学低能核物理研究所
- 作者简介：
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- Published：1986-03
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Renyuan Hu. Some physic-metallurgical problems in interactions of ion beam with solid[J]. Nuclear techniques, 1986, 09(3): 1-5,43,55.
DOI：

Renyuan Hu. Some physic-metallurgical problems in interactions of ion beam with solid[J]. Nuclear techniques, 1986, 09(3): 1-5,43,55. DOI：

摘要

离子注入及离子束混合一般包括两类物理过程：一是高速粒子与固体靶原子碰撞和级联碰撞过程，是使固体表面原子无序化过程，其结果是形成大量原子离位，造成结构损伤和缺陷；二是其后的物理化学过程，是按照热力学能量最低原则趋向有序化过程。其中，包括点阵再定位（velocation）的弛豫过程、增强扩散过程、亚稳相回到平衡态过程。在这两类过程中碰撞是整个过程的初始条件，其后物理化学过程是在这一初始条件及一定边界条件下进行的，最后决定了固体近表面处的成分、结构和性质。因此研究离子束材料改性就必须研究这两类过程对固体表面成分分布及相结构的影响，就必须研究离子束与固体相互作用中的一些物理冶金问题（或称离子注入冶金学）。本文想结合近年来研究成果对这些物理冶金问题作一概述。

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references

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